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Electrostatic Chuck×クリエイティブテクノロジー - List of Manufacturers, Suppliers, Companies and Products

Electrostatic Chuck Product List

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Customized electrostatic chuck

Customized electrostatic chuck

It is possible to propose suitable electrostatic chucks according to the objects to be held, their applications, and the environment.

Our company develops, manufactures, and sells electrostatic chucks made from various materials to meet our customers' requirements as a comprehensive electrostatic chuck manufacturer. We understand the environment in which our products will be used and the functions required, and we propose optimal product specifications through our development and design technology. Additionally, we provide high-performance and high-functionality products utilizing advanced manufacturing technology. [Examples of Optional Features] ■ Built-in Heater - By integrating stage substrate manufacturing technology with thin heater manufacturing technology, high-precision temperature control is achievable. ■ High-Temperature Compatibility - By using ALN ceramic as the material for the electrostatic chuck, it can be used in high-temperature environments up to 500°C. ■ Abnormal Discharge Countermeasures - With our know-how, we can implement measures against abnormal discharges that tend to occur around gas holes. *For more details, please refer to the PDF document or feel free to contact us.

  • Processing Contract
  • Chuck

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[Demo unit available for loan] Polyimide electrostatic chuck

[Demo unit available for loan] Polyimide electrostatic chuck

Contributes to maintaining cleanliness! Used in semiconductor manufacturing equipment and display manufacturing equipment, etc.

The "Polyimide Electrostatic Chuck" generates fewer particles due to wear and contributes to maintaining cleanliness because it has no moving parts. It can grip thin or easily deformable products without applying stress, and when used for transporting wafers or glass, it can operate with power consumption of less than 1W. Additionally, the gripping force is effective not only in the atmosphere but also in a vacuum. It is also adopted in equipment that combines atmospheric and vacuum processes. 【Features】 ■ Clean device ■ Low damage ■ Usable in a vacuum ■ Low power consumption *For more details, please refer to the PDF document or feel free to contact us.

  • Chuck
  • Other conveying machines
  • Transport and handling robots

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[Demo unit available for loan] Multi-material electrostatic chuck

[Demo unit available for loan] Multi-material electrostatic chuck

It can be used for transporting materials such as leather and sponge, as well as for folding fabric during product sewing!

The "Multi-Material Electrostatic Chuck" can adsorb and hold various objects, such as textile materials. It can adsorb fabric that cannot be held by vacuum, and it is also capable of adsorbing fabrics like cotton, which are less prone to static electricity. Additionally, because it has full surface adhesion, it is less likely to create wrinkles when adsorbing fabric. 【Features】 ■ Adsorbs and holds various objects, such as textile materials ■ Adsorbs fabric that cannot be held by vacuum ■ Adsorbs fabrics like cotton, which are less prone to static electricity ■ Full surface adhesion reduces the likelihood of wrinkles when adsorbing fabric *For more details, please refer to the PDF document or feel free to contact us.

  • Chuck
  • Other conveying machines
  • Transport and handling robots

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